Numerical study of slurry replacement and distribution in CMP using multi-zone analysis
收藏DataCite Commons2025-08-12 更新2025-09-08 收录
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https://figshare.com/articles/dataset/Numerical_study_of_slurry_replacement_and_distribution_in_CMP_using_multi-zone_analysis/29889833/1
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资源简介：
This dataset comprises time-dependent volume fraction measurements of 'Slurry B' across individual zones, as reported in the study entitled <i>"</i>Numerical study of slurry replacement and distribution in CMP using multi-zone analysis<i>"</i>. The file titles correspond to the simulation cases defined in the paper.
提供机构：
figshare
创建时间：
2025-08-12
