Image Guided In-situ Maskless Lithography Data
收藏Figshare2023-06-25 更新2026-04-08 收录
下载链接：
https://figshare.com/articles/dataset/Image_Guided_In-situ_Maskless_Lithography_Data/23575737/1
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资源简介：
The data contains experimental results for critical distance measurement and validation of our results for comparing our method with conventional methods. The values are rounded to two decimal points.
提供机构：
Paul, Ratul
创建时间：
2023-06-25
