Raw and analyzed data for manuscript "Non-thermal plasma deoxidation of copper, chromium and iron surfaces"

<strong>Abstract:</strong> Oxide layers on metal surfaces adversely affect processability and material properties in many industrial applications. While several plasma-based approaches for deoxidation were investigated in the past, oftentimes they either work under conditions expensive to create or need a long time for deoxidation. The deoxidation effect of a non-thermal dielectric barrier discharge (DBD) plasma in an Ar/H₂ gas mixture at 100 hPa and 400 °C was investigated on oxidized copper, iron and chromium surfaces. The chemical structure of surfaces before and after the deoxidation procedure was analyzed by X-ray photoelectron spectroscopy (XPS). The results revealed that the metal oxide layers on copper and iron surfaces were almost completely reduced after 10 minutes of plasma treatment, thereby exposing bare metallic surface states. Chromium surface oxides were only partly removed after deoxidation process without notable reduction in oxide layer thickness, whereas the surface compounds changed from Cr(OH)₃ and CrO₃ to mostly Cr₂O₃.摘要：金属表面的氧化层会对诸多工业应用中的加工性能与材料特性造成不利影响。过往虽已针对多种基于等离子体的脱氧方案开展了相关研究，但此类方案往往要么依赖造价高昂的实验条件，要么需耗费较长时长方可完成脱氧。本研究以经氧化处理的铜、铁及铬表面为研究对象，探究了氩氢（Ar/H₂）混合气体氛围、100 hPa与400 ℃条件下，非热介质阻挡放电（dielectric barrier discharge, DBD）等离子体的脱氧效果。研究采用X射线光电子能谱（X-ray photoelectron spectroscopy, XPS）对脱氧处理前后的表面化学结构进行了分析表征。结果显示，经10分钟等离子体处理后，铜与铁表面的金属氧化层几乎完全被还原，进而暴露出纯净的金属表面态。铬表面的氧化层仅被部分脱除，氧化层厚度无显著降低，但表面化学组分由Cr(OH)₃与CrO₃转变为以Cr₂O₃为主的形态。