Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors (Data)
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https://zenodo.org/record/5720485
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资源简介：
Origin projects, figures and COMSOL simulation used for the article "Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors", published in Journal of Sensors and Sensor Systems on 14 Jan 2019.
创建时间：
2021-11-23
