On Tailoring Structural and Optoelectronic Properties of TiO2 Thin Films Synthesized via 'Room' Temperature High Power Impulse Magnetron Sputtering (HiPIMS)

Name: On Tailoring Structural and Optoelectronic Properties of TiO2 Thin Films Synthesized via 'Room' Temperature High Power Impulse Magnetron Sputtering (HiPIMS)
Creator: Zenodo
Published: 2025-04-16T03:18:23+08:00

Zenodo2025-04-16 更新2026-05-26 收录

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https://zenodo.org/doi/10.5281/zenodo.15226756 数据链接链接失效反馈

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All data used in the creation of the mansucript: On Tailoring Structural and Optoelectronic Properties of TiO2 Thin Films Synthesized via 'Room' Temperature High Power Impulse Magnetron Sputtering (HiPIMS)

本论文撰写过程中所使用的全部数据：《通过“室温”高功率脉冲磁控溅射（High Power Impulse Magnetron Sputtering，HiPIMS）合成二氧化钛（TiO₂）薄膜的结构与光电性能调控》

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Zenodo

创建时间：

2025-04-16