Code and Processed Dataset for a Ring-Resolved Transfer Framework in DC Magnetron Sputtering

This dataset contains the code and processed data supporting a ring-resolved transfer framework for DC magnetron sputtering. The deposited materials include processed magnetic-field data, ring-resolved target-ion incidence statistics obtained from PIC-MCC simulations, sputtered-source distributions, gas-phase transport outputs based on MC-Boltzmann modeling, substrate-arrival statistics, input parameter files, and post-processing scripts used to generate the figures reported in the associated manuscript. The framework is designed to preserve statistically consistent transfer from target-ion incidence to substrate-arrival boundary conditions under a unified ring-based spatial definition. Cu is treated as the reference target material, while Ti is included as a supplementary case for assessing methodological transferability. The deposited files correspond to the processed research outputs and code generated in this work. Publicly available external resources, including LXCat and NIST, were used as input sources for collision and reference data where appropriate, but are not redistributed as part of this dataset.本数据集包含支撑直流磁控溅射环分辨输运框架的代码与经处理数据。所涵盖的经处理数据包括：磁场数据、通过粒子-胞蒙特卡洛碰撞（PIC-MCC）模拟得到的环分辨靶离子入射统计数据、溅射源分布、基于蒙特卡洛-玻尔兹曼（MC-Boltzmann）建模得到的气相输运输出结果、衬底到达统计数据，以及用于生成相关学术论文配图的输入参数文件与后处理脚本。 该框架旨在基于统一的环基空间定义，实现从靶离子入射到衬底到达边界条件的统计一致性输运。本研究以铜（Cu）作为参考靶材，同时纳入钛（Ti）作为补充案例，用于评估方法学的可迁移性。本数据集所收录的文件均为本研究中生成的经处理研究成果与代码。本数据集在合适场景下采用了公开可得的外部资源作为碰撞与参考数据的输入源，包括LXCat与NIST，但未将这些资源作为本数据集的组成部分进行重新分发。