Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics

Data used for figures in "Nanomechanical AlN resonators for room temperature quantum optoelectromechanics" Anastasiia Ciers et.al本数据集为论文《用于室温量子光机电力学的纳米机械氮化铝（Aluminum Nitride, AlN）谐振器》（Anastasiia Ciers 等人）中配图所用的数据。