Dataset related to "Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation"

These original measurement data relate to the publication: J. Schaude, T. Hausotte: Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation, Nanomanufacturing and Metrology 5, pp. 519-148, https://doi.org/10.1007/s41871-022-00143-9. Please refer to this open access publication for a detailed description of the measurement setup and procedure. All data are in ASCII-format. Each file contains six columns, where column one to three are the x, y, and z-coordinates of the positioning system, column four is the demodulated signal of the AFM (RAFM) and columns five and six are the raw signals of the z-interferometer (QA and QB). Content of the folders 10_Calibrations: Repeated calibration of the AFM against the z-interferometer of the NMM-1. 20_Standstill-Measurements: Three standstill measurements for 90 s each. 30_Long-Term-Precision: Standstill measurements for 15 s every 10 min for in sum 18 hours. 40_Scans: Repeated closed-loop scans on a calibration grating. 50_SINCOS: Repeated movement of the stage in z-direction for 2 µm with the cantilever being in free air just before the sample. Acknowledgement This project was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) –TRR 285 -Project-ID 418701707, subproject C05

本数据集的原始测量数据关联于下述学术出版物：J. Schaude与T. Hausotte：《探针方向可调且集成传感与驱动的原子力显微镜（Atomic Force Microscope, AFM）》，刊载于《纳米制造与计量（Nanomanufacturing and Metrology）》第5卷，第519-148页，DOI：10.1007/s41871-022-00143-9。有关测量装置与实验流程的详细说明，请参阅该开放获取学术出版物。

所有数据均采用ASCII格式存储。每个数据文件包含六列数据，其中第1至3列为定位系统的x、y、z坐标，第4列为原子力显微镜的解调信号（RAFM），第5与第6列为z干涉仪（z-interferometer）的原始信号（QA与QB）。

各文件夹的具体内容如下：
10_Calibrations：针对NMM-1的z干涉仪开展的原子力显微镜重复校准实验。
20_Standstill-Measurements：三次静置测量，单次测量时长为90秒。
30_Long-Term-Precision：每10分钟进行一次15秒的静置测量，总累计时长达18小时。
40_Scans：在校准光栅上进行的重复闭环扫描实验。
50_SINCOS：在悬臂处于样品前的自由空气状态下，使载物台沿z方向重复移动2μm的实验。

致谢：本项目由德国研究基金会（Deutsche Forschungsgemeinschaft, DFG）资助——TRR 285，项目ID为418701707，为其子课题C05。