E-beam evaporator inside glovebox cluster (GBox-EVA)

<p>The 2DCC Inert Atmosphere Cluster Tool enables the fabrication and characterization of air-sensitive van der Waals heterostructures and devices. It consists of three major pieces of instrumentation housed in two conjoined, argon gas-filled gloveboxes. The tool features a state-of-the-art transfer stage from HQ Graphene, an atomic force microscope from Asylum Research (MFP-3D Origin+) and a customized two-glovebox system from M. Braun, Inc, with integrated physical vapor deposition capabilities from Island e-Beam.</p><h6>Capabilities of E-Beam Evaporator (GBox-EVA)</h6><p>In-situ physical vapor deposition of contacts for air-sensitive samples, and lithography-free device fabrication with stencil mask</p><ul><li><p>Vacuum: as low as 5 * 10^-7 mbar (4 * 10^-7 Torr, 5 * 10^-5 Pa)</p></li><li><p>Up to 4 crucibles</p></li><li><p>Source materials: metals (Au, Ti, Cr, Al) and oxides (Al₂O₃)</p></li></ul><h6>Capabilities of two-box cluster (GBoxClust)</h6><p>Process air-sensitive van der Waals materials and thin films inside the glovebox</p><ul><li><p>Custom stands and mechanical connections to minimize vibration</p></li><li><p>Filled with argon gas with oxygen &lt; 0.1 PPM, water &lt; 0.1 PPM</p></li><li><p>Sample transfer through a vacuum suitcase</p></li><li><p>Exfoliation area</p></li><li><p>Hot plate</p></li></ul>