Data supporting PhD thesis: Towards Wafer-Scale Multilayer Graphene Mems Condenser Microphones

The growing significance of Micro-Electro-Mechanical Systems (MEMS) in modern and future applications highlights the need for innovation to enhance performance, reduce size, and introduce new functionalities. This thesis focuses on MEMS microphones, vital components in consumer electronics, known for their superior sound quality, low power consumption, and durability. MEMS microphones are critical for high-quality communication and human-machine interactions.Research into 2D materials, such as graphene, stems from their unique properties, which promise improvements over traditional silicon-based materials. However, despite initial successes, challenges remain in integrating graphene into MEMS. A key obstacle is the lack of fully automated fabrication processes, raising uncertainty about its ability to enhance MEMS microphones while reducing device size consistently.The dataset provided contains raw data used in this thesis, including measurements and analyses from various advanced techniques: optical and laser microscopy, transmission electron microscopy, digital holographic microscopy, white light interferometry, atomic force microscopy, scanning electron microscopy, laser Doppler vibrometry, Raman spectroscopy, electrostatic, electrical and acoustic measurement, and others.