Geometries and material properties for simulating semiconductor patterned bridge defects using the finite-difference time-domain (FDTD) method

An in-house developed finite-difference time-domain (FDTD) code has been used to simulate certain patterned defects as found in the semiconductor industry. Intrinsic...本研究采用自研的时域有限差分（finite-difference time-domain, FDTD）代码，对半导体工业中存在的部分图案化缺陷开展仿真模拟。固有（Intrinsic）……