Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique
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http://datadryad.org/dataset/doi%253A10.5061%252Fdryad.d2547d87k
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资源简介：
This research aims to synthesize and characterize the multi-graded Ta/TaN thin film coatings on AISI 52100 steel, employing the High Power Impulse Magnetron Sputtering technique. The investigation includes the microstructure, coating thickness, elemental composition, microhardness, and tribological performance using SEM, EDS, XRD, microhardness tester, and pin-on-disc tester, respectively.
Methods
In this article, the authors synthesised Ta/TaN multilayer coatings using CFUBMS-HiPIMS coating system and applied mechanical and tribological tests to these synthesised coatings. The data obtained from these tests were processed with drawing programmes and presented.
创建时间：
2023-10-04
