Raman data of deuterium and hydrogen grown boron-doped diamond

Raman spectra were recorded at room temperature using a micro-Raman spectrometer (Invia, Renishaw) equipped with an edge filter with different excitation wavelengths and lasers: UV λ = 325 nm (HeCd), blue λ = 488 nm (Ar+), green λ = 514 nm (Ar+), and IR λ = 785 nm (IR diode) and 50× microscope objective. To avoid sample heating, the radiation power was set below 2 mW while the laser spot diameter on the sample surface was about 2 µm. The spectral resolution was better than 2 cm−1. Each sample was analyzed at five randomly selected points and each spectrum was averaged from five measurements. The BDD@D and BDD@H were synthesized in the Microwave Plasma Assisted Chemical Vapor Deposition process. Diamond films were deposited on p-type (100) silicon substrates (1 × 1 cm2) and studied by Raman spectroscopy. The selected measurements were utilized when preparing the manuscript published in Small DOI: 10.1002/smll.202208265