Spectroscopic ellipsometry mapping of PAAO (AJ-7-03-31 sample)

Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 35 seconds. The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm²). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-7-03-31 Ellipsometry Mapping Measurements.rar" file. Ellipsometer: rotating compensator GES5-E (Semilab). Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum. Detector: UV-Vis CCD with 0.8 nm resolution. Spectral range: approximately 230-960 nm. Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°. Light beam size: microspot (365 × 470 μm² at 75° angle of incidence). The same sample was also measured using the same spectroscopic ellipsometry method after being covered with hydrogenated amorphous diamond-like carbon and silver nanocomposite. The data can be found here: https://doi.org/10.5281/zenodo.7257907本数据集为多孔阳极氧化铝（Porous Anodized Aluminum Oxide，PAAO）的光谱椭偏测量数据。样品通过将多晶铝在0.3 mol/L草酸溶液中以40 V电压阳极氧化4分35秒制得。测量覆盖样品全表面（约4.8 × 4.8 mm²），共布设20 × 20个测点，合计400个测点的坐标信息已收录于"mapping_points.csv"文件中。全部测量数据均整合收录于单个压缩包文件"AJ-7-03-31 Ellipsometry Mapping Measurements.rar"内。本次测量所用设备参数如下：椭偏仪为旋转补偿式GES5-E（Semilab公司）；光源为75 W短弧氙灯，光谱覆盖波长范围为185~2000 nm；探测器为紫外-可见电荷耦合器件（UV-Vis CCD），分辨率达0.8 nm；光谱测量范围约为230~960 nm；入射光角度分别设置为50°、55°、60°、65°、70°、75°；光束光斑尺寸为微光斑，在75°入射角度下光斑面积为365 × 470 μm²。此外，研究团队采用相同的光谱椭偏测量方法，对涂覆了氢化非晶类金刚石碳-银纳米复合涂层的同一样品进行了复测，相关复测数据可通过以下链接获取：https://doi.org/10.5281/zenodo.7257907