In situ XRF/GISAXS study of the nucleation rate and morphology during photo-assisted ALD of Pt
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https://doi.esrf.fr/10.15151/ESRF-ES-2144687303
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资源简介：
Photo-assisted atomic layer deposition (Photo-ALD) is an emerging field within ALD, in which UV light provides energy to the reactions for the deposition of thin films. Recently, we studied the Photo-ALD process using MeCpPtMe3 and O2 and demonstrated that UV illumination influences the Pt nucleation and allows for lower deposition temperatures compared to thermal ALD. Now, we would expand our knowledge by investigating the Photo-ALD process based on Pt(acac)2 and O3. This proposal aims to provide insights in the nucleation rate and in the morphological evolution of the Pt deposits, from initial nuclei over isolated islands to coalesced structures, via in situ X-ray fluorescence (XRF) and grazing incidence small angle X-ray scattering (GISAXS) measurements. The results will shed light on how photon-precursor/substrate interactions impact the initial nucleation density and island growth in Pt ALD.
提供机构：
Ghent University, Department of Solid State Sciences, Krijgslaan 281, S1, 9000 Ghent, Belgium; Ghent University, Department of Solid State Sciences, Krijgslaan 281, S1, 9000 , Ghent, BELGIUM; Ghent University, Department of Solid State Sciences, Krijgslaan 281, S1, 9000 , Ghent, BE
创建时间：
2028-01-01
