High-reflective surface measurement data

Phase Measuring Deflectometry (PMD) has been applied widely in the nano-precision measurement for specular surfaces. However, the surface measurement of a high-reflective surface is challenging for traditional visible PMD based on the principle of specular reflection, which cannot be directly applied to obtain low-frequency and mid-frequency errors, simultaneously. In order to solve this problem, the parallel single-pixel deflectometry is proposed based on the Fourier single-pixel compressive algorithm. Firstly, the bidirectional reflectance distribution function (BRDF) is introduced to demonstrate hybrid lighting model of area source under the inverse PMD-system constraint. Then, the method of reverse main spot positioning for hybrid lighting field is proposed based on parallel single-pixel measuring strategy, providing a nano-precision measurement program for the high-reflective surfaces. The experiment results demonstrate that the proposed method can successfully reconstruct the mid-frequency error of metal surfaces and the low-frequency surface error. The proposed method points a way forward for full-field and accurate low-frequency and mid-frequency errors of high-reflective surfaces.