EDDIE - Energy Dispersive x-rays spectroscopy for areal Density and composItion Evaluation

EDDIE is a MATLAB code for the for the evaluation of thin lms mass thick-
ness and composition based on the Energy Dispersive X-Ray Spectroscopy
(EDS). The method exploits the theoretical calculation of the in-depth char-
acteristic X-ray generation distribution function in multilayer sam-
ples, by the numerical solution of the electron trans-
port equation. Once the substrate composition in known, this method gives
reliable measurements without the need of a reference sample and/or mul-
tiple voltage acquisitions. The electron transport model is derived from the
Boltzmann transport equation and it exploits the most updated and reli-
able physical parameters in order to obtain an accurate description of the
phenomenon.

EDDIE是一款基于能量色散X射线光谱法（Energy Dispersive X-Ray Spectroscopy，EDS）的MATLAB代码，用于薄膜质量厚度与组分的评估。该方法通过电子输运方程的数值求解，对多层样品内特征X射线的深度生成分布函数开展理论计算。当已知基底组分时，该方法无需参考样品或多次电压采集即可获得可靠的测量结果。其电子输运模型源自玻尔兹曼输运方程，并采用了最新且可靠的物理参数，以实现对该物理现象的精准刻画。