Temperature calibration, normal force measurements, undisturbed motion measurements, and stick-slip motion cycles in MEMS devices with sliding sidewall surfaces

This .zip file contains research data sets acquired to investigate the temperature dependence of friction in MEMS devices with sidewall surfaces subject to frictional contact. The corresponding folders include: (a) the peak position measurements from Raman spectroscopy (Raman measurements), (b) the displacement measurements of the 'ram' until it touches a counter-surface for the normal force per contact temperature (normal force data), (c) the displacement measurements of the sliding counter-surface per temperature when it is not in contact with the ram (undisturbed data), (d) the displacement measurements of the counter-surface for increasing temperature when it is in contact with the ram (friction data from 25 to 300), and (e) the displacement measurements of the counter-surface for decreasing temperature when it is in contact with the ram (friction data from 300 to 25).本ZIP压缩包包含为探究侧壁表面存在摩擦接触的微机电系统（MEMS, Micro-Electro-Mechanical Systems）器件中摩擦力的温度依赖性所采集的研究数据集。其配套文件夹包含如下内容：(a) 拉曼光谱（Raman spectroscopy）的峰位测量数据（拉曼测量数据集）；(b) 各接触温度对应的法向力条件下，"推杆"接触对向表面前的位移测量数据（法向力数据集）；(c) 推杆未与其接触时，滑动对向表面在各温度下的位移测量数据（无干扰数据集）；(d) 推杆与其接触时，对向表面随温度升高的位移测量数据（25至300区间摩擦力数据集）；(e) 推杆与其接触时，对向表面随温度降低的位移测量数据（300至25区间摩擦力数据集）。