Supporting Data for the article "Improving UV Stability of SiO2/SiNx-Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth"

Name: Supporting Data for the article "Improving UV Stability of SiO2/SiNx-Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth"
Creator: Zenodo
Published: 2026-05-28T09:53:37+08:00

Zenodo2026-05-28 更新2026-05-29 收录

数据链接：

https://zenodo.org/doi/10.5281/zenodo.20426247 数据链接链接失效反馈

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资源简介：

Data sets supporting the article: Improving UV Stability of SiO2/SiNx-Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth.

支持论文《通过浅结注入与氧化物再生长工艺提升SiO₂/SiNₓ钝化硅光电二极管的紫外稳定性》的数据集

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Zenodo

创建时间：

2026-05-28