Evidence for layered growth of „100... textured diamond films

The growth of diamond films synthesized by the hot filament chemical vapor deposition method hasbeen studied by scanning tunneling microscopy ͑STM͒. The smooth ͑100͒ faces of micron-sizeddiamond crystallites were found to exhibit pyramidal shaped architecture at the nano level. TheSTM data for chemical vapor deposited diamond is analyzed in the light of recently developeddynamical scaling approach. The value of the scaling exponent ␣ Х0.85 signifies a growth primarilydriven by the transport of reacting species on the surface rather than molecular diffusion in gasphase.本研究采用扫描隧道显微镜（scanning tunneling microscopy，STM），对热丝化学气相沉积（hot filament chemical vapor deposition）法合成的金刚石薄膜的生长过程进行了研究。结果发现，微米级金刚石微晶的光滑（100）晶面在纳米尺度下呈现出金字塔状的微观结构。针对化学气相沉积金刚石的STM数据，本研究结合新近发展的动力学标度方法展开了分析。分析结果显示，标度指数α约为0.85，这表明该生长过程主要由反应物种在表面的输运所主导，而非气相中的分子扩散。