Raw and analysed data for contribution paper "Investigation of deoxidation mechanisms on Cu surfaces in a dielectric barrier discharge plasma"

<strong>Abstract</strong><br> In this study, we present a laboratory setup for the deoxidation of 10 × 10 mm2 samples via dielectric barrier discharge (DBD) plasma and we show results for the deoxidation of copper in an Ar/H2 atmosphere at 1000 hPa. The effect of combined heat and DBD plasma treatment was investigated by heating surfaces up to 250 °C during plasma operation. All results were compared for surfaces before and after plasma treatment. The chemical structure of surfaces was studied using X-ray Photoelectron Spectroscopy (XPS) and the morphology was measured via Confocal Laser Scanning Microscopy (CLSM). Additionally, the properties of the plasma during the reduction of copper oxides were investigated via Optical Emission Spectroscopy (OES).<strong>摘要</strong><br> 本研究搭建了一套针对10×10 mm²试样的介质阻挡放电（dielectric barrier discharge, DBD）等离子体脱氧实验装置，并报告了在1000 hPa的Ar/H₂气氛下对铜进行脱氧处理的实验结果。本研究考察了等离子体作业过程中，将铜表面加热至250℃的热-等离子体联合处理的作用效果。所有实验结果均以等离子体处理前后的铜表面作为对照进行对比。采用X射线光电子能谱（X-ray Photoelectron Spectroscopy, XPS）分析了铜表面的化学结构，通过共聚焦激光扫描显微镜（Confocal Laser Scanning Microscopy, CLSM）表征了表面形貌；此外，还借助光学发射光谱（Optical Emission Spectroscopy, OES）探究了铜氧化物还原过程中等离子体的特性。