Electron beam damage to TIs

Transport data, point spread functions, and analysis code accompanying "Low-damage electron beam lithography for nanostructures on Bi2Te3-class topological insulator thin films."本数据集包含随附于《Bi₂Te₃类拓扑绝缘体（topological insulator）薄膜上纳米结构的低损伤电子束光刻（electron beam lithography）》一文的输运数据、点扩散函数（point spread functions）及分析代码。