Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique

This research aims to synthesize and characterize the multi-graded Ta/TaN
thin film coatings on AISI 52100 steel, employing the High Power Impulse
Magnetron Sputtering technique. The investigation includes the
microstructure, coating thickness, elemental composition, microhardness,
and tribological performance using SEM, EDS, XRD, microhardness tester,
and pin-on-disc tester, respectively.

本研究旨在采用高功率脉冲磁控溅射（High Power Impulse Magnetron Sputtering）技术，在AISI 52100钢基底上合成并表征梯度多层Ta/TaN薄膜涂层。本研究分别采用扫描电子显微镜（Scanning Electron Microscope，SEM）、能谱仪（Energy Dispersive Spectrometer，EDS）、X射线衍射仪（X-ray Diffraction，XRD）、显微硬度计及销盘式摩擦磨损试验机，对涂层的微观组织、涂层厚度、元素组成、显微硬度与摩擦学性能开展表征与分析。