Dataset for: "Additively manufactured degradable piezoelectric microsystems for sensing and actuating"

Dataset for "Additively manufactured degradable piezoelectric microsystems for sensing and actuating" Morgan Monroe1,2, Nicolas Fumeaux1, L. Guillermo Villanueva2, and Danick Briand1 1Soft Transducers Laboratory (LMTS), EPFL, Switzerland [e-mail], [e-mail] 2Advanced NEMS Laboratory (A-NEMS), EPFL, Switzerland This data set contains the data collected during the FNS project Green Piezo (Grant no. 179064) in association with the recent publication entitled "Additively manufactured degradable piezoelectric microsystems for sensing and actuating" DOI: 10.1002/admt.202300745 ------------------------------------------------------------------------------------------------------------------------------- Manuscript Abstract: The increasing global overabundance of electronic waste and concerns regarding the energy and material-intensive processes associated with traditional electronics manufacturing is driving the development of solution processed, degradable electronics. In particular, solution processed, degradable piezoelectrics have widespread potential in sustainable electronics, due to their diverse use in both sensing and actuating applications and the current industry predominance of lead-based materials. Yet current eco-friendly multi-material printing processes are limited by both the conventional challenges of multilayer process integration as well as the low-temperature thermal constraints of biodegradable materials. In this study, we present a novel approach to the fabrication of additively manufactured and sustainable piezoelectric devices made with degradable electrode materials on paper substrates. The screen-printed, eco-friendly KNbO3 piezoelectric transducers are combined with degradable carbon- or zinc-based conductive inks. We evaluate the physical, dielectric, and piezoelectric properties of the devices, assessing the influence of electrode material on device performance. We report on effective piezoelectric coefficients as high as 4.6 pC N-1 and 5.1 pC N-1 for printed piezoelectric devices on paper substrates with carbon and zinc electrodes respectively. We then demonstrate the applicability of the developed technology in both sensing and actuating applications. Thus, we present the first instance of sustainable fully additively manufactured piezoelectric force sensors and acoustic speakers. By demonstrating entirely printable piezoelectric devices compatible with various green electrode materials, we work to develop more complex sustainable printed piezoelectric technologies in the future. The data set consists of the following folders: Device design files Physical characterization data Dielectric characterization data Force Sensor Demonstrator data Speaker Demonstrator data Below is a detailed description of the data types and contents of each folder. In many files, the naming convention includes one of two key material indicators. In reference to ink properties, the term "Ink Active Material" indicates the primary ingredient in the ink being characterized. This is either KNbO3, Zinc, or Carbon. The specific ink compositions can be found in the Methods portion of the associated manuscript. In reference to devices being characterized, the term "Electrode Material" indicates the primary component of the printed or deposited electrode layers of the devices (as the piezoelectric layer is always the printed KNbO3 film). The electrode materials are either "Gold" (referring to thermally evaporated Gold of approximately 100nm thickness) which was used as a reference electrode material, "Zinc" (referring to screen printed zinc ink as described in the manuscript), or "Carbon" (Referring to screen printed carbon ink as described in the manuscript). ------------------------------------------------------------------------------------------------------------------------------- Data types There are 13 file types in this data set: .pdf, .png, .tif, .txt, .dat, .csv, .svg, .stl, .py, .vi, .dwf3work, .aup3, .wav .pdf files pdf files in this repository contain summaries of images used in physical characterization, aggregated for ease of visualization. These are exported from Photoshop files and thus include full image information. .png and .tif files These files contain scanning electron microscopy images of the printed samples on silicon, in cross-section. .txt, .csv, and .dat files These files contain raw data from device characterization. These file types are comma delimited and the files can be opened with text editors such as Notepad++. Column headers elaborate on the data contained within each file. .svg files These files contain vector data displaying the full designs of devices fabricated in this study. This data can be opened with a vector graphics editor such as InkScape. The various layers of each file denote a different layer of the device design, and can be treated individually as masks for the relevant layers. .stl files These files contain design information for 3D components. These files can be opened with any 3D design software such as FreeCAD. All .stl files included in this repository are reproduced from Shannon Ley (https://pinshape.com/items/36134-3d-printed-3d-printed-headphones). .py files These files contain python scripts used to process the raw data after collection. These scripts can be opened and edited with standard python scripting interfaces. Each script is commented with descriptions of the overall file as well as in-line comments for user orientation. .vi files These files contain LabVIEW scripts used to collect raw data during measurements. These scripts can be opened and edited with LabVIEW from version 2020. The script is commented with descriptions of the overall file as well as in-line comments for user orientation. Only one file in this dataset is of this filetype. .dwf3work files These files contain Digilent Waveforms workspaces used to collect raw data during measurements. These scripts can be opened using the opensource Digilent Waveforms software (https://digilent.com/shop/software/digilent-waveforms/) to view the recorded data and all relevant recording parameters at time of measurement. .aup3 files These files contain Audacity workspaces used to collect and process audio data during speaker characterization measurements. These files can be opened using the opensource Audacity software (https://www.audacityteam.org/). .wav files These files are audio files of the data exported from Audacity during speaker device characterization and can be opened with any audio processing software. ------------------------------------------------------------------------------------------------------------------------------- 01 Characterization Device Design This folder contains the design files associated with the fabrication of the basic printed devices used for characterization studies. 01 CapacitorsALL.svg A vector file containing the whole-device design of the capacitor style devices used in primary characterization. Each layer of the file is a layer of the device, and was used for the ordering and fabrication of associated screen printing meshes and shadowmasks. 02 BottomElectrode.svg A vector file containing the design of solely the bottom electrode layer for devices used in primary characterization. This design was used for the ordering and fabrication of associated screen printing meshes and shadowmasks. 03 PiezoelectricLayer.svg A vector file containing the design of solely the piezoelectric layer for devices used in primary characterization. This design was used for the ordering and fabrication of associated screen printing meshes and shadowmasks. 04 TopElectrode.svg A vector file containing the design of solely the top electrode layer for devices used in primary characterization. This design was used for the ordering and fabrication of associated screen printing meshes and shadowmasks. ------------------------------------------------------------------------------------------------------------------------------- 02 Physical Characteristics This folder contains all the data associated with characterizing the physical properties of the piezoelectric devices in this manuscript. 01 Particle Size Analysis 01 Images: A folder of SEM images as .png files. These images are cross-sectional SEM images of samples used to evaluate the particle size distribution for the KNbO3, Zinc, and carbon powders using in device fabrication. A second set of images with an appended filename ("traces") in the same folder portrays the sizing lines used to randomly sample particles for sizing. 02 ParticleSizeDistribution_RAW.csv: A data file containing the raw measurements collected using the above images in tandem with ImageJ processing software. Data was used to produce histograms of particle size distributions for the KNbO3, Zinc, and Carbon particles. 02 Profilometry 01 Profilometry Data: A folder of raw data collected as profilometry measurements in the form of .dat files. Data files are labelled using the convention "Profile_[Electrode Material]_DeviceStack_Sample[#].dat" (Ex: "Profile_Carbon_DeviceStack_Sample2.dat"). All measurements begin with a measure of the paper substrate as reference before approaching the sample, where it crosses all 3 layers of the sample before returning to the paper substrate, creating a series of layer-cake-like steps from which layer thicknesses can be determined. 02 ProfilometeryDataPlotter.py: a python script to batch import and plot the above collected raw profilometry data. 03 Cross-section Optical Images A folder containing optical microscopy images of the printed devices in cross-section when printed on paper substrates. The naming convention used is "Optical_[Electrode Material]_[microscope Magnification]_[Image number in that condition].tif" (Ex: "Optical_Carbon_x50_01.tif"). 04 Cross-section SEM Images A folder containing scanning electron microscopy ("SEM") images of the printed devices in cross-section when printed on silicon substrates. The naming convention used is "SEM_[Electrode Material]_[microscope Magnification]_[Image number in that condition].tif" (Ex: "SEM_Carbon_1k_01.tif"). 05 Ink Rheology Summary data collected during rheological measurements of the KNbO3, Zinc, and Carbon inks, as .txt files. The naming convention is "Viscosity_[Ink Primary Component]Ink.txt" (Ex: "Viscosity_ZincInk.txt") 06 Degradation Study 01 DegradationStudy_MassChange.csv: A data file containing the raw measurements collected during the degradation studies. Data includes the specific samples under test and their measured mass at specific dates, as measured after drying. 02 Degradation Study Images.pdf: a .pdf file containing the raw degradation images used in this study, correlated to the dates of imaging and text conditions. ------------------------------------------------------------------------------------------------------------------------------- 03 Electrical Characteristics This folder contains all the data associated with characterizing the dielectric and piezoelectric properties of the piezoelectric devices in this paper. 01 Impedance Data 01 ImpedanceDataAnalysis.py The python analysis script used to batch analyze and plot the raw impedance data collected for these samples. Takes the files in the associated folder as input and outputs arrays of measured capacitance and permittivity values for the data analyzed, as well as plots of the processed impedance data as a function of frequency. 02 Raw Impedance Data The raw impedance data used to evaluate the dielectric properties of the devices, including two file types: ".csv": Impedance data collected for capacitor style devices of each electrode type, in the after exporting the relevant impedance, phase, and capacitance data from the raw collection file format. Naming convention is "Impedance_[electrode material]_ALL.csv" (Ex: "Impedance_Carbon_ALL.csv"). ".dwf3work": Raw Impedance data collected for capacitor style devices of each electrode type, in the original files as collected using Digilent Waveforms Software (open source). Data is split into two files based on the size of the capacitors being measured, (either 5 and 10 mm2 devices, or 20 and 30mm2 devices). The naming convention used is "Impedance_[Electrode Material]__[capacitor surface areas tested].dwf3work" (Ex: "Impedance_Zinc_5&10mm2.dwf3work"). 02 Berlincourt Data This folder contains all the data associated with characterizing the piezoelectric properties of the devices in this manuscript. It includes 3 files, sorted by the electrode material of the devices under test, and reports the average d33,eff values (over 3 repetitions) measured for those devices based on the applied poling Voltage and field. The naming convention used is "BerlincourtData_[Electrode Material].csv" (Ex: "BerlincourtData_Carbon.csv"). ------------------------------------------------------------------------------------------------------------------------------- 04 Force Sensor Demonstrator This folder contains all the data associated with force sensor demonstrator reported on in the associated manuscript. 01 TouchGrid.svg A vector file containing the whole-device design of the force sensor device used in this sensing demonstration. Each layer of the file is a layer of the device, and was used for the ordering and fabrication of associated screen printing meshes. 02 VoltageMeasurement.vi A LabView script file used for recording the output voltage of the piezoelectric devices as a function of time. To be used in combination with an Agilent 34410A or 34411A Multimeter. Outputs Voltage response as a function of time from the initiation of the recorded measurement. 03 Single Force Data This folder contains data associated with characterizing the force sensor demonstrators reported on in this manuscript. It includes 3 sub-folders, sorted by the electrode material of the devices under test. The naming convention used for the sub-folders is "SingleForce_[Electrode Material]" (Ex: "SingleForce_Zinc"). Within each sub-folder is a series of data files (.csv) detailing the test and data conditions. Each sample was compressed with a set force in a series of pulses. The naming convention used for the files in the sub-folders is "[Electrode Material]_[Max Applied Force]_[MeasuredData].csv" (Ex: "Gold_12.5N_MM.csv"), where the measured data is either "_F" or "_MM" for Force data or Multimeter data respectively. "_F.csv": The files include data recorded by the Instron Pull tester of the force applied to the sample as a function of time. This data is associated with the measured voltage in the paired "_MM.csv" file. "_MM.csv": The files include data recorded by a LabVIEW script in tandem with an Agilent multimeter of the voltage produced by the sample associated with the incident force in the paired "_F.csv" file. 04 Stepped Force Data This folder contains data associated with characterizing the force sensor demonstrators reported on in this manuscript. It includes 3 sub-folders, sorted by the electrode material of the devices under test. The naming convention used for the sub-folders is "SteppedMeasurements_[Electrode Material]" (Ex: "SteppedMeasurements_Gold"). Within each sub-folder is a series of data files (.csv) detailing the test and data conditions. Each sample was compressed with a series of pulses successively increasing in applied force. The naming convention used for the files in the sub-folders is "[Electrode MaterialSteppedSweep[#]_[MeasuredData].csv" (Ex: "Carbon_SteppedSweep1_F.csv"), where the measured data is either "_F" or "_MM" for Force data or Multimeter data respectively, and the # indicates the repetition number of that specific measurement. Other details are the same as those described above for the subfolder data of 03 Single Force Data. ------------------------------------------------------------------------------------------------------------------------------- 05 Speaker Demonstrator This folder contains all the data associated with speaker demonstrator reported on in the associated manuscript. 01 Speaker Design 01 SpeakersBuzzers.svg A vector file containing the design of the components used to fabricate the piezoelectric buzzer for the speaker demonstrator. This includes a baseplate onto which the piezoelectric devices were adhered, two rings as standoffs, and two long traces used for the "contact wires". All components were lasercut from cardboard or cardstock components. 02 3D Design Files A folder containing the design files (.stl) for 3D printing of the headphone chassis, including the headband, ear cans, and baffles. All designs were provided open source by Shannon Ley (https://pinshape.com/items/36134-3d-printed-3d-printed-headphones). 02 Speaker Data 01 RawAudioRecordings A folder containing the raw audio recordings used in speaker characterization, in the form of .aup3 files, directly from the recording software (Audacity). File naming convention is "[Electrode Material]_[Device Size used]_[Recording sampling rate]_RAW.aup3" (Ex: "Zinc_5x30mm2_44.1khz_RAW.aup3"). 02 Exported Audio A folder containing the exported audio recordings used in speaker characterization after trimming to a consistent length of 15s, and exporting from the recording software (Audacity) in the form of .wav files. Each sub-folder has naming convention of "[Electrode Material]_[Device Size used]_[Recording sampling rate]_export" (Ex: "Zinc_5x30mm2_44.1khz_export"), and contains a number of files. Each file within these folders is labelled with the frequency at which the speaker was actuated for that recording data. These files were then imported into Origin, where an FFT was used to extract the amplitude of the recorded data at that specific actuating frequency. 03 Speaker LDV A folder containing the laser doppler vibrometry data collected for speakers with either Zinc or Carbon-electroded piezoelectric actuators. The data comes in two formats: as-produced from Digilent Waveforms (.dwf3work), or exported (.csv) files. The naming convention for the raw data is "[Electrode Material]_[Speaker active area]_LDV_Raw.dwf3work" (Ex: "Zinc_5x30mm2_LDV_Raw.dwf3work"). The naming convention for the exported data is "[Electrode Material]_[Speaker active area]_LDV_Export.csv" (Ex: "Zinc_5x30mm2_LDV_Export.csv")."面向传感与驱动的增材制造可降解压电微系统"数据集 Morgan Monroe1,2、Nicolas Fumeaux1、L. Guillermo Villanueva2与Danick Briand1 1 瑞士洛桑联邦理工学院软换能器实验室（Soft Transducers Laboratory, LMTS） [e-mail], [e-mail] 2 瑞士洛桑联邦理工学院先进纳机电系统实验室（Advanced NEMS Laboratory, A-NEMS） 本数据集收录了瑞士国家科学基金会（Fonds National Suisse, FNS）"绿色压电"（Green Piezo，项目编号179064）项目期间采集的实验数据，与近期发表的题为《面向传感与驱动的增材制造可降解压电微系统》的论文相关联。 DOI: 10.1002/admt.202300745 ------------------------------------------------------------------------------------------------------------------------------- 论文手稿摘要： 全球电子废弃物总量持续过剩，且传统电子制造过程能耗高、耗材量大，这些问题推动了溶液加工型可降解电子器件的研发。其中，溶液加工型可降解压电材料因可同时应用于传感与驱动场景，且当前工业界主流压电材料仍以含铅体系为主，在可持续电子领域拥有广阔的应用前景。然而，当前环保型多材料打印工艺仍面临两大瓶颈：一是多层工艺集成的传统难题，二是可生物降解材料对低温热加工的严苛限制。 本研究提出了一种全新的制备方案，可在纸质基底上采用可降解电极材料制造增材制造型可持续压电器件。研究将丝网印刷的环保型铌酸钾（KNbO3）压电换能器与可降解碳基或锌基导电油墨相结合。本研究对器件的物理、介电与压电性能进行了表征，分析了电极材料对器件性能的影响规律。实验结果表明，纸质基底上的印刷压电器件分别采用碳电极与锌电极时，其有效压电系数最高可达4.6 pC·N⁻¹与5.1 pC·N⁻¹。随后，本研究验证了所开发技术在传感与驱动场景中的应用可行性。据此，本研究实现了首款完全采用增材制造工艺的可持续压电式力传感器与声学扬声器。本研究通过验证全印刷压电器件可兼容多种环保电极材料，为未来开发更复杂的可持续印刷压电技术奠定了基础。 本数据集包含以下文件夹： - 器件设计文件 - 物理表征数据 - 介电表征数据 - 力传感器演示装置数据 - 扬声器演示装置数据 下文将详细说明各文件夹内的数据类型与具体内容。多数文件的命名规则包含两类关键材料标识之一： 针对油墨特性，"油墨活性成分（Ink Active Material）"指待表征油墨的主要组分，可选范围为铌酸钾（KNbO3）、锌（Zinc）或碳（Carbon）。油墨的具体组分可参见相关论文手稿的方法学部分。 针对待表征的器件，"电极材料（Electrode Material）"指器件印刷或沉积电极层的主要组分（压电层始终为印刷制备的KNbO3薄膜）。电极材料可选以下三类："金（Gold）"指厚度约100nm的热蒸发金层，作为对照电极材料；"锌（Zinc）"指本论文手稿中所述的丝网印刷锌基油墨；"碳（Carbon）"指本论文手稿中所述的丝网印刷碳基油墨。 ------------------------------------------------------------------------------------------------------------------------------- 数据类型 本数据集共包含13类文件格式：.pdf、.png、.tif、.txt、.dat、.csv、.svg、.stl、.py、.vi、.dwf3work、.aup3、.wav .pdf文件：本仓库中的pdf文件汇总了物理表征所用图像的摘要，便于直观查看。此类文件从Adobe Photoshop源文件导出，保留完整图像信息。 .png与.tif文件：此类文件为印刷样品在硅基底上的横截面扫描电子显微镜（Scanning Electron Microscopy, SEM）图像。 .txt、.csv与.dat文件：此类文件包含器件表征的原始数据，均采用逗号分隔格式，可通过Notepad++等文本编辑器打开。文件头列详细说明了每个文件内的数据内容。 .svg文件：此类文件为矢量格式数据，展示了本研究中制备的器件完整设计图。可通过InkScape等矢量图形编辑软件打开。每个文件的不同图层对应器件设计的不同结构层，可单独作为相关层的掩模使用。 .stl文件：此类文件包含三维部件的设计信息，可通过FreeCAD等三维设计软件打开。本仓库中的所有.stl文件均改编自Shannon Ley发布的开源设计（https://pinshape.com/items/36134-3d-printed-3d-printed-headphones）。 .py文件：此类文件为用于后处理采集到的原始数据的Python脚本，可通过标准Python脚本编辑环境打开并修改。每个脚本均包含整体功能说明注释与行内注释，便于用户理解与使用。 .vi文件：此类文件为测量过程中用于采集原始数据的LabVIEW脚本，可通过2020及更高版本的LabVIEW软件打开并编辑。脚本包含整体功能说明注释与行内注释，便于用户理解与使用。本数据集仅包含1个该格式的文件。 .dwf3work文件：此类文件为Digilent Waveforms工作区文件，用于测量过程中采集原始数据。可通过开源Digilent Waveforms软件（https://digilent.com/shop/software/digilent-waveforms/）打开，查看录制的数据与测量时的所有相关采集参数。 .aup3文件：此类文件为Audacity工作区文件，用于扬声器表征测量过程中采集与处理音频数据。可通过开源Audacity软件（https://www.audacityteam.org/）打开。 .wav文件：此类文件为扬声器器件表征过程中从Audacity导出的音频文件，可通过任意音频处理软件打开。 ------------------------------------------------------------------------------------------------------------------------------- 01 表征用器件设计 本文件夹包含用于表征研究的基础印刷器件的设计文件。 01 CapacitorsALL.svg：矢量文件，包含首次表征所用电容式器件的完整设计图。文件的每个图层对应器件的一个结构层，用于定制与制备配套的丝网印刷网版与掩模。 02 BottomElectrode.svg：矢量文件，包含首次表征所用器件的底部电极层设计图。该设计用于定制与制备配套的丝网印刷网版与掩模。 03 PiezoelectricLayer.svg：矢量文件，包含首次表征所用器件的压电层设计图。该设计用于定制与制备配套的丝网印刷网版与掩模。 04 TopElectrode.svg：矢量文件，包含首次表征所用器件的顶部电极层设计图。该设计用于定制与制备配套的丝网印刷网版与掩模。 ------------------------------------------------------------------------------------------------------------------------------- 02 物理特性表征 本文件夹包含与本论文中压电器件物理性能表征相关的全部数据。 01 粒径分析 01 图像：包含扫描电子显微镜图像的文件夹，文件格式为.png。此类图像为用于评估器件制备所用KNbO3、锌与碳粉末粒径分布的样品横截面SEM图像。文件夹内另有一组文件名附加"traces"字样的图像，其中包含用于随机采样粒子以进行粒径分析的标尺线。 02 ParticleSizeDistribution_RAW.csv：数据文件，包含通过上述图像与ImageJ处理软件采集的原始测量数据，用于绘制KNbO3、锌与碳颗粒的粒径分布直方图。 02 轮廓仪测量 01 轮廓仪数据：以.dat格式存储的轮廓仪测量原始数据文件夹。数据文件命名规则为"Profile_[Electrode Material]_DeviceStack_Sample[#].dat"（示例："Profile_Carbon_DeviceStack_Sample2.dat"）。所有测量均以纸张基底为参考基准，先扫描基底再进入样品，依次穿过样品的三层结构后返回基底，形成类似层状蛋糕的台阶轮廓，由此可计算各层厚度。 02 ProfilometeryDataPlotter.py：用于批量导入并绘制上述采集到的轮廓仪原始数据的Python脚本。 03 横截面光学图像 包含纸质基底上印刷器件的横截面光学显微镜图像的文件夹。命名规则为"Optical_[Electrode Material]_[显微镜放大倍数]_[该条件下的图像编号].tif"（示例："Optical_Carbon_x50_01.tif"）。 04 横截面SEM图像 包含硅基底上印刷器件的横截面扫描电子显微镜图像的文件夹。命名规则为"SEM_[Electrode Material]_[显微镜放大倍数]_[该条件下的图像编号].tif"（示例："SEM_Carbon_1k_01.tif"）。 05 油墨流变学 包含KNbO3、锌与碳油墨流变学测量汇总数据的.txt文件，命名规则为"Viscosity_[Ink Primary Component]Ink.txt"（示例："Viscosity_ZincInk.txt"）。 06 降解研究 01 DegradationStudy_MassChange.csv：包含降解研究期间采集的原始测量数据的文件，数据包含待测样品的具体信息与干燥后特定日期的称量质量。 02 Degradation Study Images.pdf：包含本研究中所用降解过程原始图像的.pdf文件，图像与成像日期及测试条件一一对应。 ------------------------------------------------------------------------------------------------------------------------------- 03 电气特性表征 本文件夹包含与本论文中压电器件介电与压电性能表征相关的全部数据。 01 阻抗数据 01 ImpedanceDataAnalysis.py：用于批量分析与绘制上述样品阻抗原始数据的Python分析脚本。以对应文件夹内的文件为输入，输出分析得到的电容与介电常数数组，并绘制处理后的阻抗数据随频率变化的曲线。 02 原始阻抗数据 用于评估器件介电性能的原始阻抗数据，包含两类文件格式： ".csv"：从各电极类型的电容式器件采集的阻抗数据，从原始采集文件格式导出相关阻抗、相位与电容数据。命名规则为"Impedance_[electrode material]_ALL.csv"（示例："Impedance_Carbon_ALL.csv"）。 ".dwf3work"：从各电极类型的电容式器件采集的原始阻抗数据，为使用Digilent Waveforms开源软件采集的原始文件。根据被测电容的尺寸分为两类文件（分别对应5与10 mm²器件，或20与30 mm²器件）。命名规则为"Impedance_[Electrode Material]__[capacitor surface areas tested].dwf3work"（示例："Impedance_Zinc_5&10mm2.dwf3work"）。 02 柏林科特测试数据 本文件夹包含与本论文中器件压电性能表征相关的全部数据，包含3个按被测器件电极材料分类的文件，记录了基于外加极化电压与电场测得的各器件平均有效d33,eff值（重复3次测量的平均值）。命名规则为"BerlincourtData_[Electrode Material].csv"（示例："BerlincourtData_Carbon.csv"）。 ------------------------------------------------------------------------------------------------------------------------------- 04 力传感器演示装置 本文件夹包含与相关论文中报道的力传感器演示装置相关的全部数据。 01 TouchGrid.svg：矢量文件，包含本传感演示所用力传感器器件的完整设计图。文件的每个图层对应器件的一个结构层，用于定制与制备配套的丝网印刷网版。 02 VoltageMeasurement.vi：用于记录压电器件输出电压随时间变化的LabVIEW脚本文件，需与Agilent 34410A或34411A万用表配合使用。输出从测量开始时刻起的电压响应随时间变化的数据。 03 单力测试数据 包含与本论文中报道的力传感器演示装置表征相关的数据，包含3个按被测器件电极材料分类的子文件夹。子文件夹命名规则为"SingleForce_[Electrode Material]"（示例："SingleForce_Zinc"）。每个子文件夹内包含一系列.csv数据文件，详细说明测试与数据采集条件。每个样品均以一系列脉冲形式施加固定压力进行压缩。子文件夹内的文件命名规则为"[Electrode Material]_[Max Applied Force]_[MeasuredData].csv"（示例："Gold_12.5N_MM.csv"），其中MeasuredData分别为"_F"或"_MM"，对应力数据或万用表数据。 "_F.csv"：包含由Instron拉力测试仪记录的施加到样品的力随时间变化的数据，该数据与配对的"_MM.csv"文件中的测量电压相对应。 "_MM.csv"：包含由LabVIEW脚本与Agilent万用表协同采集的、与配对"_F.csv"文件中入射力对应的样品产生的电压数据。 04 阶梯力测试数据 包含与本论文中报道的力传感器演示装置表征相关的数据，包含3个按被测器件电极材料分类的子文件夹。子文件夹命名规则为"SteppedMeasurements_[Electrode Material]"（示例："SteppedMeasurements_Gold"）。每个子文件夹内包含一系列.csv数据文件，详细说明测试与数据采集条件。每个样品均以一系列脉冲形式施加依次递增的压力进行压缩。子文件夹内的文件命名规则为"[Electrode Material]_SteppedSweep[#]_[MeasuredData].csv"（示例："Carbon_SteppedSweep1_F.csv"），其中MeasuredData分别为"_F"或"_MM"，对应力数据或万用表数据，#代表该特定测量的重复次数。其他细节与03单力测试数据子文件夹的说明一致。 ------------------------------------------------------------------------------------------------------------------------------- 05 扬声器演示装置 本文件夹包含与相关论文中报道的扬声器演示装置相关的全部数据。 01 扬声器设计 01 SpeakersBuzzers.svg：矢量文件，包含用于制造扬声器演示装置中压电蜂鸣器的组件设计图，包括用于粘贴压电器件的底板、两个用于支撑的环以及两根用于"连接导线"的长导电迹线。所有组件均通过激光切割从纸板或卡片料上制成。 02 三维设计文件 包含耳机机架3D打印设计文件（.stl）的文件夹，包括头带、耳罩与挡板。所有设计均由Shannon Ley提供的开源设计改编（https://pinshape.com/items/36134-3d-printed-3d-printed-headphones）。 02 扬声器数据 01 原始音频录制文件 包含扬声器表征所用的原始音频录制文件，格式为.aup3，直接来自录制软件Audacity。文件命名规则为"[Electrode Material]_[Device Size used]_[Recording sampling rate]_RAW.aup3"（示例："Zinc_5x30mm2_44.1khz_RAW.aup3"）。 02 导出音频 包含经过剪辑至统一15秒长度并从Audacity导出的扬声器表征所用音频文件，格式为.wav。每个子文件夹的命名规则为"[Electrode Material]_[Device Size used]_[Recording sampling rate]_export"（示例："Zinc_5x30mm2_44.1khz_export"），包含多个音频文件。每个子文件夹内的文件均以该次录制时扬声器的驱动频率命名。此类文件随后导入Origin软件，通过快速傅里叶变换（FFT）提取该特定驱动频率下录制数据的振幅。 03 扬声器激光多普勒测振数据 包含采用锌或碳电极的压电致动器扬声器的激光多普勒振动测量数据。数据包含两种格式：由Digilent Waveforms生成的原始文件（.dwf3work）与导出的.csv文件。原始数据的命名规则为"[Electrode Material]_[Speaker active area]_LDV_Raw.dwf3work"（示例："Zinc_5x30mm2_LDV_Raw.dwf3work"）。导出数据的命名规则为"[Electrode Material]_[Speaker active area]_LDV_Export.csv"（示例："Zinc_5x30mm2_LDV_Export.csv"）。