Data supporting PhD thesis: Towards Wafer-Scale Multilayer Graphene Mems Condenser Microphones

The growing significance of Micro-Electro-Mechanical Systems (MEMS) in modern and future applications highlights the need for innovation to enhance performance, reduce size, and introduce new functionalities. This thesis focuses on MEMS microphones, vital components in consumer electronics, known for their superior sound quality, low power consumption, and durability. MEMS microphones are critical for high-quality communication and human-machine interactions.Research into 2D materials, such as graphene, stems from their unique properties, which promise improvements over traditional silicon-based materials. However, despite initial successes, challenges remain in integrating graphene into MEMS. A key obstacle is the lack of fully automated fabrication processes, raising uncertainty about its ability to enhance MEMS microphones while reducing device size consistently.The dataset provided contains raw data used in this thesis, including measurements and analyses from various advanced techniques: optical and laser microscopy, transmission electron microscopy, digital holographic microscopy, white light interferometry, atomic force microscopy, scanning electron microscopy, laser Doppler vibrometry, Raman spectroscopy, electrostatic, electrical and acoustic measurement, and others.

微机电系统（Micro-Electro-Mechanical Systems, MEMS）在现代及未来应用中的地位愈发凸显，这凸显了通过技术创新提升其性能、缩小器件尺寸并引入新功能的迫切需求。本论文聚焦消费电子领域的核心组件——MEMS麦克风，其凭借卓越的音质、低功耗与耐用性广受认可，是实现高质量通信与人机交互的关键部件。针对石墨烯等二维材料的研究，源于其独特的材料特性，相较传统硅基材料有望实现性能跃升。然而，尽管已取得初步进展，将石墨烯集成至MEMS器件中仍面临诸多挑战，其中一项核心阻碍是缺乏完全自动化的制备工艺，这使得其能否在持续缩小器件尺寸的同时有效提升MEMS麦克风性能的前景尚存不确定性。本论文配套的数据集包含研究过程中产生的原始数据，涵盖多种先进表征与分析技术所得的测量与分析结果，具体包括：光学与激光显微技术、透射电子显微镜、数字全息显微镜、白光干涉术、原子力显微镜、扫描电子显微镜、激光多普勒测振术、拉曼光谱法，以及静电、电学与声学测量技术等。