RBS analysis of titanium dioxide films deposited with the sol-gel spin coating technique

Titanium dioxide nanoparticles can be synthesized using different techniques; among these, the sol-gel spin coating is fast and economical and guarantees excellent results. This work reports the results of the characterization of TiO2 films, prepared with the sol-gel spin coating method on glass and silicon, with the Rutherford Backscattering Spectrometry (RBS). The influence of rotation speed and sol-gel volume deposited on the film thickness was investigated. Furthermore, the effect of heat treatment was evaluated. The results showed that as the speed increases, the thickness of the film decreases with an exponential trend. The volume of sol-gel deposited does not affect the thickness instead. Heat treatments induce a decrease in the film thickness and an elimination of the solvents present in the sol-gel.

二氧化钛纳米颗粒可通过多种技术合成，其中溶胶-凝胶旋涂法兼具快速、经济的优势，且可获得优异的制备效果。本研究报道了采用溶胶-凝胶旋涂法在玻璃与硅片基底上制备的二氧化钛（TiO₂）薄膜的卢瑟福背散射光谱法（Rutherford Backscattering Spectrometry, RBS）表征结果。本研究探究了旋涂转速与沉积溶胶-凝胶体积对薄膜厚度的影响，并进一步评估了热处理工艺的作用效果。结果表明，薄膜厚度随旋涂转速提升呈指数级下降趋势，而沉积的溶胶-凝胶体积则对薄膜厚度无显著影响。热处理可使薄膜厚度降低，并去除溶胶-凝胶体系中残留的溶剂。