Supplemental Material for ``Laser annealing enabled resistance reduction and stable frequency tuning of superconducting qubits"

We present supplementary material describing the relationship between variations in $R_n$ and laser annealing parameters, as well as TEM analysis of Josephson junctions and laser annealing parameters, as well as microstructural analysis of Josephson junctions.

本文提供补充材料，内容涵盖$R_n$的变化与激光退火参数之间的关联、针对约瑟夫森结（Josephson junctions）与激光退火参数的透射电子显微镜（TEM，Transmission Electron Microscopy）分析，以及约瑟夫森结的微观结构分析。