Automated visual inspection of CMS HGCAL silicon sensors

A custom semi-automated visual inspection system has been implemented in the clean room for HGCAL sensor testing. The system uses a programmable xy-stage, the sensor is moved beneath a combination of a microscope and a camera in a scan pattern.

一套定制化半自动视觉检测系统已在洁净室中部署，用于HGCAL传感器的测试。该系统采用可编程XY位移台，使传感器以扫描模式在显微镜与相机的组合装置下方移动。