Data accompanying the publication: Utilizing focused field as a probe for shape determination of subwavelength structures via coherent Fourier scatterometry

Authors (publication): Anubhav Paul, Robin Wever, Sarika Soman, Silvania F. Pereira<br>This dataset contains the raw and processed data, together with analysis scripts/helper functions, supporting the results reported in the publication “Utilizing focused field as a probe for shape determination of subwavelength structures via coherent Fourier scatterometry”. It includes datasets from coherent Fourier scatterometry (CFS) far-field signatures acquired under tightly focused illumination (λ = 633 nm) for nanopillars with different geometries (cylindrical, triangular, square, and rectangular) and multiple orientations, as well as corresponding 3D FDTD simulation outputs used for direct comparison with experiments. The dataset includes processed results derived from these far-field measurements/simulations, such as the rotation-dependent correlation metric used to identify shape-specific periodic signatures, and parameter-sweep data used in the paper’s limitation analyses (e.g., lateral dimension, height dependence, and robustness to shape distortions such as edge roundness). The dataset is organized to enable reproducibility of the reported figures and can be reused for related research on subwavelength shape characterization and optical metrology using focused-field scatterometry.

发表论文作者：Anubhav Paul、Robin Wever、Sarika Soman、Silvania F. Pereira

本数据集包含支撑发表论文《利用聚焦场作为探针，通过相干傅里叶散射法（Coherent Fourier Scatterometry, CFS）确定亚波长结构形状》中报告结果的原始数据与处理后数据，以及分析脚本与辅助函数。

数据集涵盖针对不同几何构型（圆柱形、三角形、方形及矩形）、多种取向的纳米柱，在紧聚焦照明（波长λ=633 nm）下采集的相干傅里叶散射法远场特征数据，以及用于与实验直接对比的三维时域有限差分法（3D Finite-Difference Time-Domain, 3D FDTD）仿真输出结果。

数据集还包含从上述远场测量与仿真结果中衍生的处理后结果，例如用于识别形状特异性周期特征的旋转相关度量，以及用于论文局限性分析的参数扫描数据（如横向尺寸、高度依赖性，以及对边缘圆角等形状畸变的鲁棒性）。

本数据集的组织结构可复现论文中报告的所有图表，同时也可复用至亚波长形状表征及基于聚焦场散射法的光学计量学相关研究中。