Data from: Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model

Supporting Information for Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface modelThe Table S1 is about Eight sets of results based on RSM model predictions and CFD simulation; The Figures S1-S3 are about temperature profile with different regions and different speeds; The Figures S3-S15 are about mass fractions of Ga-containing with different regions and different speeds.s-1.docx

基于计算流体动力学（CFD）模拟与对应表面模型的行星式GaN金属有机化学气相沉积（MOCVD）薄膜沉积速率优化研究配套支持信息。表S1收录了基于响应面法（RSM）模型预测与CFD模拟得到的8组结果；图S1~S3展示了不同区域、不同转速下的温度分布；图S3~S15展示了不同区域、不同转速下含Ga组分的质量分数。s-1.docx