ROBUST MEMS WAVEGUIDE SWITCH FOR THZ SPECTROSCOPY IN SPACE

This paper presents a robust microelectromechanical system (MEMS) waveguide switch operating at 500-600 GHz for water (H2O) and hydrodeoxygenation (HDO) detection at 557 GHz and 600 GHz, respectively. This non-contact switch utilizes an electromagnetic bandgap (EBG) surface to avoid leakage even though there is a physical gap between the waveguide ports and the connecting U-bend waveguide. The U-bend waveguide is placed on a rotating disc that is moved with a rotational comb drive. The comb drive can rotate +/-4.5°with an actuation voltage of 60 V.本论文提出了一款工作于500~600吉赫兹频段的稳健型微机电系统（microelectromechanical system, MEMS）波导开关，可分别在557吉赫兹与600吉赫兹下实现水（H2O）与加氢脱氧（hydrodeoxygenation, HDO）的检测。该非接触式开关采用电磁带隙（electromagnetic bandgap, EBG）表面结构，即便波导端口与连接用U型弯曲波导之间存在物理间隙，也可避免信号泄漏。U型弯曲波导搭载于由旋转梳状驱动器驱动的旋转圆盘之上，该梳状驱动器可实现±4.5°的旋转角度，驱动电压为60伏。