Dataset for publication "Crystalline β-Ga2O3 thin films deposited via reactive magnetron sputtering of a liquid Ga target"

Name: Dataset for publication "Crystalline β-Ga2O3 thin films deposited via reactive magnetron sputtering of a liquid Ga target"
Creator: Zenodo
Published: 2026-04-08T11:44:45+08:00

Zenodo2026-05-15 更新2026-05-26 收录

数据链接：

https://zenodo.org/doi/10.5281/zenodo.19455040 数据链接链接失效反馈

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资源简介：

Dataset for publication "Crystalline β-Ga2O3 thin films deposited via reactive magnetron sputtering of a liquid Ga target"

用于发表论文《通过液态镓靶反应磁控溅射制备结晶态β-Ga₂O₃薄膜》的数据集

提供机构：

Zenodo

创建时间：

2026-04-08

Dataset for publication "Crystalline β-Ga2O3 thin films deposited via reactive magnetron sputtering of a liquid Ga target"

资源简介：

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