Tomas Grejtak - Chromium nitride sample #P21

The surface topography of a chromium nitride sample #P21 was measured using a scanning white-light interferometer (Wyko model NT 9100, Bruker USA). Each measurement was done using the same conditions:
Objective: 10X
Image Size: 878 x 657 µm
Pixel size: 0.642 µm
Scanning mode: VSI
The surface topographies, post-processing and roughness calculations (the average roughness (Ra) and the root mean square roughness (Rq)) were done using Vision 4.10 Software (Veeco Instruments, Inc).
The surface was not initially flat and was tilted using Vision’s “Tilt (Plane Fit)” function. The surface did not require additional filtering. Three measurements were performed on each sample. The values from the three measurements were used to determine the average and standard deviation of the roughness values. The standard deviation was determined using Excel function “STDEV”.
Prior to the topography measurements, all samples were rinsed in methanol and the surface was blown dry using a compressed air.

采用扫描白光干涉仪（scanning white-light interferometer，型号Wyko NT9100，美国布鲁克公司）对氮化铬样品#P21的表面形貌进行了测量。所有测量均采用统一实验条件：物镜倍率10倍，成像尺寸878×657 µm，像素尺寸0.642 µm，扫描模式为VSI。表面形貌采集、后处理及粗糙度计算（含算术平均粗糙度（average roughness，记为Ra）与均方根粗糙度（root mean square roughness，记为Rq））均通过Vision 4.10软件（Veeco仪器公司）完成。样品初始表面不平整，故通过Vision软件的"Tilt (Plane Fit)"功能进行了倾斜校正，且无需额外滤波。每个样品均开展三次重复测量，利用三次测量结果计算粗糙度参数的平均值与标准差，其中标准差通过Excel的"STDEV"函数计算得到。在形貌测量前，所有样品均经甲醇冲洗，并采用压缩空气吹干表面。