Supplementary material for the paper "Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation"

A novel manufacturing process for optical gratings suitable for use in the UV and soft X-ray regimes in a single-crystal diamond substrate based on highly focused swift heavy-ion irradiation. This type of grating is extensively used in light source facilities such as synchrotrons or free electron lasers, with ever-increasing demands in terms of thermal loads, depending on beamline operational parameters and architecture. The process may be a future alternative to current manufacturing techniques, providing the advantage of being applicable to single-crystal diamond substrates, with their unique properties in terms of heat conductivity and radiation hardness.

AFM measured topography of single-crystal diamond sample irradiated with 9 MeV C ions with a dose pattern tuned to obtain a blazed soft X-ray grating.

一种基于高聚焦快重离子辐照技术的新型光学光栅制备工艺，可制备适用于紫外（UV）与软X射线波段的单晶金刚石衬底光栅。此类光栅被广泛应用于同步辐射光源、自由电子激光器等光源装置中，根据光束线的运行参数与架构的不同，对其热负荷性能的要求日益提高。该工艺有望成为现有制备技术的未来替代方案，其优势在于可适配单晶金刚石衬底，这类衬底具备优异的热导率与抗辐射特性。

原子力显微镜（Atomic Force Microscopy，AFM）测得的单晶金刚石样品表面形貌：该样品经9兆电子伏特碳离子辐照，且辐照剂量图案经过优化以制备闪耀型软X射线光栅。