Data from ICMTS2017 paper "Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor"

Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.

本研究制备了测试结构，用于优化电化学氧传感器（electrochemical oxygen sensor）内图案化固态聚合物电解质（patterned solid polymer electrolyte）的设计与制备工艺。测试结果表明，光刻胶显影液（photoresist developer）与底层绝缘材料（underlying insulator material）的选型，会对该聚合物结构的耐用性产生影响。经该聚合物包覆的测试电极，可有效支撑电化学氧检测（electrochemical oxygen detection）。