Data for "Improved Characterisation (ImC) of structured surfaces"

Data for paper: "Improved Characterisation (ImC) of structured surfaces"Surface characterisation, commonly used to assess the properties of a manufactured part, plays a crucial role in surface metrology. While most existing surface characterisation methods are focused on comparing the measured surface to a design surface according to their fixed surface-defining parameters, they seem to struggle to quantify how the surface-defining parameters deviate from their design values, primarily due to the uncertainties introduced in the manufacturing processes (compared to the low uncertainty in the measurement processes). Such parameter deviations are critical for evaluating the functional performance of manufactured parts. This is particularly true for structured surfaces, where repeated elements contribute to the final functional performance in an average manner. In this paper, an improved characterisation (ImC) method for structured surfaces is proposed. The ImC method combines six degrees of freedom transformation with the degrees of freedom from the surface-defining parameters to best fit the design surface to the measured surface, rather than relying solely on six degrees of freedom transformation to register with the design surface. The ImC method, implemented using the digital optimisation method, is verified using both simulated and measured surfaces with different types of structures, including a blazed grating, one-dimensional and two-dimensional sinusoidal surfaces, and a microlens array surface. Results show that the ImC method is accurate and effective, as well as notably generic, and can be applied to a broad range of applications in surface characterisation, even beyond structured surfaces.

论文数据：《结构化表面的改进表征（ImC）》
表面表征作为加工零件性能评估的常用手段，在表面计量学领域占据核心地位。尽管现有多数表面表征方法均以固定的表面定义参数为依据，将实测表面与设计表面进行比对，但这类方法难以量化表面定义参数与其设计值之间的偏差——这主要源于加工过程中引入的不确定性（相较之下，测量过程的不确定性极低）。此类参数偏差对于评估加工零件的功能性能至关重要，对于结构化表面而言更是如此：其重复单元以平均效应的方式共同决定了最终的功能性能。本文提出了一种面向结构化表面的改进表征（ImC）方法。该方法将六自由度变换与表面定义参数的自由度相结合，以实现设计表面与实测表面的最优匹配，而非仅依赖六自由度变换完成与设计表面的配准。本文采用数值优化方法实现该ImC方法，并通过包含闪耀光栅、一维与二维正弦表面以及微透镜阵列表面在内的多种结构的仿真表面与实测表面完成了验证。结果表明，该ImC方法兼具准确性、有效性与极强的通用性，可广泛应用于各类表面表征场景，甚至可拓展至非结构化表面领域。