A New Route to Synthesize MnSe Thin Films by Chemical Bath Deposition Method

Manganese selenide (MnSe) crystalline thin film was produced with chemical bath deposition on substrates (commercial glass). Transmittance, absorption, optical band gap and refractive index were investigated by UV/VIS spectrum. The hexagonal form was observed in the structural properties in XRD. The structural and optical properties of the MnSe thin films were analyzed at different pHs. SEM and EDX analysis were used for the surface analysis in the films. The films had the best crystalline at pH: 9. At pHs of 11 and 10 the MnSeO4 structure was observed. The films with the lowest film thickness were found in baths prepared with pH: 11. The highest refractive index was observed in films produced with a pH of 10 at a film density of 1.96. The grain size of MnSe thin films has a higher value at pH: 9.

本研究采用化学浴沉积法，在商用玻璃衬底上制备了硒化锰（MnSe）结晶薄膜。通过紫外-可见（UV/VIS）光谱表征，对薄膜的透光率、吸收率、光学带隙及折射率开展了测试分析。X射线衍射（XRD）结构表征结果显示，该薄膜呈六方晶型。针对不同pH值条件下制备的硒化锰薄膜，系统分析了其结构与光学性能。采用扫描电子显微镜（SEM）与能量色散X射线谱（EDX）对薄膜的表面形貌与元素组成进行了表征。当pH值为9时，所制备薄膜的结晶性能最优。当pH值为10和11时，薄膜中出现了硒酸锰（MnSeO4）相结构。在pH值为11的制备液中得到的薄膜厚度最小。当薄膜密度为1.96时，pH值为10条件下制备的薄膜折射率最高。pH值为9时制备的硒化锰薄膜，其晶粒尺寸更大。