Spectroscopic ellipsometry mapping of PAAO:DLC:Ag (AJ-8-03-31-DLCAg sample)

Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO) covered with hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite. The sample was made by 2 processes: (1) anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 5 minutes and 4 seconds and then (2) depositing DLC:Ag employing reactive unbalanced magnetron sputtering in direct current mode using silver target (80 sccm argon gas flow, 5.4 sccm C₂H₂ gas flow, 405 V voltage, 0.09-0.10 A current, 7·10^-3 mbar work pressure, 2 minutes 32 seconds process duration). The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm²). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-8-03-31-DLCAg Ellipsometry Mapping Measurements.rar" file. Ellipsometer: rotating compensator GES5-E (Semilab). Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum. Detector: UV-Vis CCD with 0.8 nm resolution. Spectral range: approximately 230-960 nm. Light incidence angles: 55°, 60°, 65°, 70°, 75°. Light beam size: microspot (365 × 470 μm² at 75° angle of incidence). The same sample was also measured using the same spectroscopic ellipsometry method before being covered with DLC:Ag. The data can be found here: https://doi.org/10.5281/zenodo.7056065本数据集为覆盖氢化非晶类金刚石碳-银（DLC:Ag）纳米复合材料的多孔阳极氧化铝（porous anodized aluminum oxide, PAAO）的光谱椭偏测量数据。样品制备分为两步：(1) 将多晶铝置于0.3 mol/L草酸溶液中，以40 V电压阳极氧化5分4秒；(2) 采用直流反应非平衡磁控溅射工艺沉积DLC:Ag涂层，具体工艺参数如下：以银靶为溅射靶材，氩气流量80 sccm，乙炔（C₂H₂）流量5.4 sccm，工作电压405 V，工作电流0.09~0.10 A，工作压强7×10⁻³ mbar，工艺持续时长2分32秒。本次测量覆盖样品全表面（约4.8×4.8 mm²）的20×20个点位，总计400个测量点位的坐标已存储于"mapping_points.csv"文件中。所有测量数据均收录于单个压缩包"AJ-8-03-31-DLCAg 椭偏映射测量数据.rar"内。本次测量所用仪器参数如下：椭偏仪为搭载旋转补偿器的GES5-E型椭偏仪（Semilab公司）；光源为75 W氙短弧灯，光谱覆盖波长范围185~2000 nm；探测器为分辨率0.8 nm的紫外-可见电荷耦合器件（UV-Vis CCD）；光谱测量范围约230~960 nm；入射光角度分别为55°、60°、65°、70°、75°；光斑尺寸为微光斑，当入射角度为75°时光斑面积为365×470 μm²。在样品未覆盖DLC:Ag涂层前，采用相同的光谱椭偏方法对其进行了测量，相关数据可通过链接https://doi.org/10.5281/zenodo.7056065获取。