Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - dataset

This data set contains the data shown in the corresponding publication in Plasma Sources Science and Technology (https://doi.org/10.1088/1361-6595/acb815). This publication presents the first implementation of terahertz (THz) quantum cascade lasers (QCLs) for high-resolution absorption spectroscopy on plasmas. Absolute densities of ground state atomic oxygen were directly obtained by using the fine structure transition at approximately 4.75 THz. Measurements were performed on a low-pressure capacitively coupled radio frequency oxygen discharge. The results show that the presented method is well suited to measure atomic oxygen densities, and it closes the THz gap for quantitative atomic density measurements in harsh environments such as plasmas.

本数据集收录自发表于《等离子体源科学与技术》（Plasma Sources Science and Technology，https://doi.org/10.1088/1361-6595/acb815）的相关研究论文。该论文首次将太赫兹（terahertz，THz）量子级联激光器（quantum cascade lasers，QCLs）应用于等离子体的高分辨率吸收光谱检测。研究通过约4.75太赫兹处的精细结构跃迁，直接测得基态原子氧的绝对数密度。实验以低压容性耦合射频氧放电为对象开展了相关测量。结果表明，该方法可精准适配原子氧数密度的定量检测，填补了等离子体等严苛环境下定量原子密度测量的太赫兹频段空白。