Improving the Yield and Lifetime of Microfabricated Sensors for Harsh Environments

This dataset is a companion to the paper, 'Improving the Yield and Lifetime of Microfabricated Sensors for Harsh Environments'. This details several methods of increasing the robustness of microfabricated microelectrodes for use in the molten salt LKE at 450 degrees Celsius. The dataset includes: (a) Yield statistics for two different microelectrode layouts (IML and RCA), which comprise the number of working and failed electrodes for each design. (b) Measurements to determine the lifetime of the IML and RCA electrodes. These measurements were of the reduction and oxidation of AgCl. The measurements were made consecutively until the device failed, and each is stored as a separate text file of applied potential vs measured current. (c) Experiments performed using test structures, where the potential was held steady and the current monitored for 15 minutes. Each set of measurements are stored as a .csv file, which contains three experiments per size of test structure for four test structures.

本数据集为论文《面向恶劣环境的微加工传感器良率与寿命提升研究》（Improving the Yield and Lifetime of Microfabricated Sensors for Harsh Environments）的配套数据集，详细阐述了可提升微加工微电极在450℃熔融盐LKE环境中鲁棒性的多种方法。数据集包含以下内容：(a) 两种不同微电极布局（IML与RCA）的良率统计数据，涵盖各设计方案下正常工作电极与失效电极的数量；(b) 用于测定IML与RCA电极寿命的测量数据：针对氯化银（AgCl）的还原与氧化反应开展测试，连续进行测量直至器件失效，每项测量均以独立文本文件存储，文件内容为施加电位与实测电流的对应关系；(c) 采用测试结构开展的实验数据：实验过程中保持电位恒定，持续监测电流15分钟。每组测量数据均存储为.csv格式文件，每类尺寸的测试结构对应3组实验，共包含4类测试结构。