Data accompanying the publication: Coherent Fourier scatterometry a holistic tool for inspection of isolated particles or defects on gratings

This dataset contains simulated datasets and MATLAB scripts used to reproduce key results in the associated publication “Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings”. It includes simulated split-detector differential scan signals of a silicon diffraction grating (period p = 792 nm) for three scenarios: (i) no particle, (ii) a 100 nm particle on top of a grating line, and (iii) a 100 nm particle on the grating substrate. The accompanying MATLAB scripts generate the corresponding plots. The dataset is structured to support reproducibility and reuse, and may be useful for related research involving grating diffraction defect inspection simulations.

本数据集包含用于复现关联论文《"Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings"》核心研究成果的仿真数据集与MATLAB脚本。该数据集包含周期p=792 nm的硅基衍射光栅在三种场景下的分探测器差分扫描信号(split-detector differential scan signals)：(i) 无颗粒；(ii) 光栅线条顶部存在100 nm颗粒；(iii) 光栅基底上存在100 nm颗粒。配套的MATLAB脚本可生成对应绘图。本数据集的结构设计旨在支持研究结果的可复现性与复用性，可用于涉及光栅衍射缺陷检测仿真的相关研究。