聚合物先驱体陶瓷超材料无线无源薄膜传感器制备数据集

本数据集来源于国家重点研发计划"2021YFB3200500-基于聚合物先驱体陶瓷的超材料无线无源高温极端环境传感技术"课题二。本数据集围绕聚合物先驱体陶瓷超材料无线无源薄膜传感器的制备过程展开，主要包含不同旋涂层数的聚合物先驱体陶瓷薄膜样品表面和横截面的扫描电子显微镜（SEM）图像以及能量色散光谱（EDS）能谱图。这些数据对于深入研究薄膜传感器的微观结构特征、元素分布情况，以及制备工艺对薄膜结构的影响提供了关键依据，有助于优化传感器的制备工艺，提升传感器性能该内容主要深入研究了提拉法和旋涂法两种薄膜成型工艺，通过调整优化成型工艺参数，在氧化铝和镍基合金基底上制备了不同厚度的薄膜，但是由于聚合物先驱体在高温转化成瓷的过程中体积收缩过大，产生裂纹。因此为了控制裂纹，通过引入Al2O3，TiSi2，Si，Al等填料，可以有效的抑制裂纹的出现和扩散，最终制备出相对致密、厚度可控的聚合物先驱体陶瓷薄膜。

This dataset is derived from Task 2 of the National Key R&D Program of China under grant number 2021YFB3200500, titled "Wireless Passive High-Temperature Extreme Environment Sensing Technology Based on Polymer Preceramic Metamaterials". This dataset focuses on the fabrication process of polymer preceramic metamaterial-based wireless passive thin-film sensors, and mainly includes scanning electron microscope (SEM) images and energy-dispersive X-ray spectroscopy (EDS) spectra of the surface and cross-section of polymer preceramic ceramic thin-film samples with different spin-coating layers. These data provide critical evidence for in-depth studies of the microstructural characteristics and elemental distribution of thin-film sensors, as well as the impact of fabrication processes on thin-film structures, and contribute to optimizing the sensor fabrication process and improving sensor performance. This study mainly investigates two thin-film forming processes: dip coating and spin-coating. By adjusting and optimizing the process parameters, thin films with different thicknesses were fabricated on alumina and nickel-based alloy substrates. However, excessive volume shrinkage during the high-temperature conversion of polymer preceramics into ceramics leads to the formation of cracks. To address this issue, the introduction of fillers such as Al2O3, TiSi2, Si, and Al can effectively suppress the occurrence and propagation of cracks, ultimately enabling the fabrication of relatively dense polymer preceramic ceramic thin films with controllable thickness.