Monte Carlo transport of sputtered Cu in Ar in the Eisenmenger-Sittner post-magnetron geometry: dataset

Raw Monte Carlo outputs, summaries and derived numbers underlying the article “Finite-aperture Monte Carlo scoring of sputtered-atom angular transport: reproduction and cross-section sensitivity in a Cu–Ar benchmark” (A. Bouazza, submitted). The reference experiment is C. Eisenmenger-Sittner et al., J. Vac. Sci. Technol. A 13, 2435 (1995). Contents. raw/frozen_baseline/: the frozen baseline, 16 seeds × 10⁶ histories at 0.12, 0.40, 0.70 and 1.00 Pa, with the full configuration. raw/diagnostics/: diagnostic runs of the frozen model from 0.05 to 2 Pa (angular, energy and collision-origin tallies). raw/sensitivity/, raw/orifice_sensitivity/: sensitivity runs (constant cross-section, cos²θ emission, ion energy, orifice displacement). raw/sputra_crosscheck/: the 2×2 factorial cross-check with SPUTRA collision physics. raw/estimator_development/: estimator-development records used only for Appendix A and Table A2 (not frozen-model results). summaries/: aggregated results. measured/: measured angular distributions of the 1995 paper (Figs. 7 and 8), digitised from the published figures (reading uncertainty about ±0.03). numbers/: every model-derived number quoted in the article, by key. A README in the archive documents the file formats and a short Python example. All tallies are relative next-event-estimator weights; ratios and normalised distributions are meaningful, absolute values are not. Code. The simulation code is not part of this record and is not publicly released. The algorithm is specified step by step in Appendix B of the article, and the frozen configuration is stored in the data. The code can be made available confidentially to editors and reviewers on request.