Very high growth rate chemical vapor deposition of single-crystal diamond
收藏PubMed Central2002-09-12 更新2026-05-16 收录
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https://pmc.ncbi.nlm.nih.gov/articles/PMC130492/
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资源简介:
Diamond possesses extraordinary material properties, a result that has given rise to a broad range of scientific and technological applications. This study reports the successful production of high-quality single-crystal diamond with microwave plasma chemical vapor deposition (MPCVD) techniques. The diamond single crystals have smooth, transparent surfaces and other characteristics identical to that of high-pressure, high-temperature synthetic diamond. In addition, the crystals can be produced at growth rates from 50 to 150 μm/h, which is up to 2 orders of magnitude higher than standard processes for making polycrystalline MPCVD diamond. This high-quality single-crystal MPCVD diamond may find numerous applications in electronic devices as high-strength windows and in a new generation of high-pressure instruments requiring large single-crystal anvils.
提供机构:
National Academy of Sciences
创建时间:
2002-09-12



