Research data supporting "Defect characterisation of {10-13} GaN by electron microscopy"

Figure 1a) Raw BSE image of the semipolar GaN sample at 6.9° tilt Figure 1b) Raw BSE image of the semipolar GaN sample at 3.9° tilt Figure 1c) Raw BSE image of the semipolar GaN sample at -1.8° tilt Figure 1d) Raw SE image of the semipolar GaN sample at 6.9° tilt Figure 2a) Raw SE image of the area mapped by CL Figure 2b) Raw data for the CL meanspectrum at 10K in .csv format Figure 2 CL Map) Raw data of the hyperspectral CL map measured at 10K in .bin format Figure 3a) Raw data of temperature dependent spectra away from defects in .csv format Figure 3b) Raw data of temperature dependent spectra on I1 stacking faults in .csv format Figure 3c) Raw data of temperature dependent spectra on prismatic stacking faults in .csv format Figure 4a) Raw SE image of the area mapped by CL Figure 4 CL Map) Raw data of the hyperspectral CL map measured at 300K in .bin format All .bin files can be opened with the open source LumiSpy Python library

图1a) 倾斜6.9°的半极性氮化镓（GaN）样品的原始背散射电子（BSE）图像；图1b) 倾斜3.9°的半极性GaN样品的原始BSE图像；图1c) 倾斜-1.8°的半极性GaN样品的原始BSE图像；图1d) 倾斜6.9°的半极性GaN样品的原始二次电子（SE）图像；图2a) 被阴极荧光（CL）表征区域的原始SE图像；图2b) 10K温度下CL平均能谱的原始数据，格式为.csv；图2 CL图谱) 10K温度下测得的高光谱CL图谱原始数据，格式为.bin；图3a) 远离缺陷区域的温度依赖光谱原始数据，格式为.csv；图3b) I1型堆垛层错处的温度依赖光谱原始数据，格式为.csv；图3c) 棱柱面堆垛层错处的温度依赖光谱原始数据，格式为.csv；图4a) 被CL表征区域的原始SE图像；图4 CL图谱) 300K温度下测得的高光谱CL图谱原始数据，格式为.bin；所有.bin格式文件均可通过开源Python库LumiSpy打开