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Fig A. (a) Electrical characterization setup for AC measurements using a frequency analyzer and (b) DC measurements using the Kiethley 6487 Picoammeter. Fig B. Reproducibility distribution of 25 nm gap on a single wafer per lithography. Of the fabricated electrodes, 49% have a gap sized of 25 nm. Fig C. FTIR spectrometry analyzed with PSNG/APTES, PSNG/APTES/hCGab and PSNG/APTES/hCGab/hCG samples. Fig D. AC capacitance and permittivity (inset) measurements for pregnant and non-pregnant women’s urine. Fig E. Conductivity measurements for pregnant and non-pregnant women’s urine. (DOCX)
图A：(a) 采用频率分析仪开展交流（AC，Alternating Current）测量的电学表征装置，以及(b) 采用吉时利（Keithley）6487皮安计进行直流（DC，Direct Current）测量的电学表征装置。图B：单次光刻工艺下单晶圆上25 nm间隙的重现性分布情况。所制备的电极中，49%的间隙尺寸为25 nm。图C：针对PSNG/APTES、PSNG/APTES/hCGab及PSNG/APTES/hCGab/hCG样品开展的傅里叶变换红外（FTIR，Fourier Transform Infrared）光谱分析。图D：孕妇与非孕妇尿液的交流电容及介电常数（内嵌图）测量结果。图E：孕妇与非孕妇尿液的电导率测量结果。(DOCX)
