Dataset accompanying the manuscript "Multi-Method Electrical Characterisation of Thin Indium Tin Oxide Films: Structuring and Calibration Sample Development for Scanning Probe Microscopy", which will be submitted to PSSA.

This dataset accompanies the manuscript which will be submitted to PSSA: Ermilova, E., Hülagü, D., Weise, M.,de Préville, S., Hoffmann, J., Morán-Meza, J., Piquemal, F., Hertwig, A., "Multi-Method Electrical Characterisation of Thin Indium Tin Oxide Films: Structuring and Calibration Sample Development for Scanning Probe Microscopy". It contains spectroscopic ellipsometry (SE) measurements and modelling data of ITO films, as well as electrical properties of these samples obtained by four-point probe method (4PM). The sheet resistance measurements of the microstructured ITO films determined by scanning microwave microscopy (SMM) are also presented here.本数据集配套将投稿至PSSA的研究手稿： Ermilova, E., Hülagü, D., Weise, M., de Préville, S., Hoffmann, J., Morán-Meza, J., Piquemal, F., Hertwig, A., 《氧化铟锡薄膜的多方法电学表征：面向扫描探针显微镜的结构化与校准样品开发》（Multi-Method Electrical Characterisation of Thin Indium Tin Oxide Films: Structuring and Calibration Sample Development for Scanning Probe Microscopy） 本数据集包含氧化铟锡（Indium Tin Oxide, ITO）薄膜的光谱椭偏术（SE）测量与建模数据，以及通过四探针法（4PM）测得的该类样品的电学性能参数。此外，本数据集还收录了通过扫描微波显微镜（SMM）测定的结构化氧化铟锡薄膜的薄层电阻测量结果。