Nb/a-Si/Nb Josephson junctions for high-density superconducting circuits

This comprehensive data set includes the electrical characterization measurements of sputtered Nb/a-Si/Nb Josephson junctions (JJs) for high-speed and high-density superconducting electronics. JJs were studied with critical current densities (Jc) ranging from 0.01 mA/?m^2 to 3 mA/?m^2 and with and without annealing at various temperatures. These properties indicate that Nb/a-Si/Nb Josephson junctions are a potential candidate to extend the speed and circuit density of superconducting electronics to 50 nm diameter (25 mA/?m^2) JJs.本综合数据集涵盖了面向高速、高密度超导电子学的溅射沉积铌/非晶硅/铌约瑟夫森结（Josephson junctions，以下简称JJ）的电学表征测试数据。所研究的约瑟夫森结的临界电流密度（Jc）范围为0.01 mA/μm²至3 mA/μm²，包含经不同温度退火与未经退火的样品。上述特性表明，铌/非晶硅/铌约瑟夫森结有望将超导电子学的运行速度与电路集成密度提升至适配直径50 nm（临界电流密度25 mA/μm²）约瑟夫森结的水平。