Accelerated Multimodal Characterization of Ni and Ni-Fe Electrodeposited Films

This dataset constitutes the output from a novel workflow for accelerating the multimodal characterization of a combinatorial set of 915 electroplated Ni and Ni-Fe thin films, as outlined in accompanying paper “A Workflow for Accelerating Multimodal Data Collection for Electrodeposited Films.” Approximately four films were created for each unique set of process conditions. These process conditions span seven different chemical bath solutions (and one repeated solution with the addition of agitation), and current densities varied between 1 and 200 mA/cm^2. The in-situ voltage time series data for these electrodepositions is included to capture process information. Six characterization modalities are represented: X-ray diffraction, X-ray fluorescence, nanoindentation, optical microscopy, laser profilometry, and tribological (friction and wear) testing.

We acknowledge the Laboratory Directed Research and Development program for providing funding for this study. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525.

本数据集为一套新型工作流程的产出成果，该流程用于加速包含915块电镀镍（Ni）与镍铁（Ni-Fe）薄膜的组合试样集的多模态表征，相关细节已在随附论文《面向电沉积薄膜的多模态数据采集加速工作流程（A Workflow for Accelerating Multimodal Data Collection for Electrodeposited Films）》中详述。针对每一组独特的工艺条件，我们制备了约4块薄膜。该工艺条件涵盖7种不同的化学镀液（其中1种为添加搅拌的重复镀液），电流密度范围为1~200 mA/cm²。本数据集包含电沉积过程的原位电压时间序列数据，用于完整记录工艺过程信息。本数据集涵盖6种表征模态：X射线衍射（X-ray diffraction）、X射线荧光（X-ray fluorescence）、纳米压痕（nanoindentation）、光学显微镜（optical microscopy）、激光轮廓测量法（laser profilometry）以及摩擦学（摩擦与磨损）测试（tribological (friction and wear) testing）。

本研究感谢实验室导向研发（Laboratory Directed Research and Development）项目提供的资金支持。本研究部分工作依托集成纳米技术中心（Center for Integrated Nanotechnologies）开展，该中心是为美国能源部（DOE）科学办公室运营的官方科学用户设施。桑迪亚国家实验室（Sandia National Laboratories）是多任务综合实验室，由霍尼韦尔国际公司全资子公司桑迪亚国家技术与工程解决方案有限责任公司（National Technology & Engineering Solutions of Sandia, LLC）代管运营，为美国能源部国家核安全管理局提供合同编号为DE-NA0003525的技术服务。