Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

Dataset containing analysis on a hierarchical porous silicon structure. The structure consists of 1µm macropores hexagonally arranged and interconnected by mesopores in the range of 60nm. Included are a scanning electron micrograph of an overview of the macroporous structure which can be analysed to obtain structural properties such as the pore diameter, surface roughness, surface area and pore volume. Also included are reconstructed transmission electron microscopy and transmission x-ray microscopy tomography data to analyse the same structural parameters on smaller and larger length scale, respectively.本数据集包含针对分级多孔硅结构的分析内容。该结构由呈六边形排列的1μm级大孔（macropores）构成，且这些大孔通过孔径范围为60nm的介孔（mesopores）相互连通。数据集收录了该大孔结构全貌的扫描电子显微照片，可通过分析该照片获取孔径、表面粗糙度、比表面积及孔体积等结构特性参数。此外还收录了重构后的透射电子显微镜（transmission electron microscopy）与透射X射线显微镜（transmission x-ray microscopy）断层扫描数据，可分别在更小与更大的长度尺度下分析上述结构参数。